MS15 (UHV edition)
1 Dimensional UHV

MS15 (UHV edition)

  • for ultra-high vacuum conditions up to 10^(-9) mbar
  • ultra compact design
  • 3.5mm travel
  • 15 x 15 mm footprint


Ultra small miniature translation stages with piezo electic inertial drive. UHV edition of MS15.


Technical data
Width15 mm
Height7 mm
Depth15 mm
Travel3 mm
Article NumberMS.015.0490
Mass6 g
Velocity1.5 mm/s
Max. load
Momentum (Mx)4 Ncm
Momentum (My)4 Ncm
Momentum (Mz)4 Ncm
Blocking force (Fx)3 N
Bearing force (Fy, Fz)20 N
Guidance accuracy
Yaw angle20 arc sec
Pitch angle60 arc sec
Vertical deviation1 um
Lateral deviation2 um
* you need to install the STP Viewer to view these files