← All positioners

MS15 (HV edition)

MS15 (HV edition)
1 DimensionalVacuum

High vacuum 1D linear

MS15 (vacuum edition)

  • for high vacuum conditions up to 10⁻⁶ mbar
  • ultra compact design
  • 3.5mm travel
  • xyz – combination possible
Travel
3.5 mm
W × D × H
15 × 15 × 7 mm
Article no.
MS.015.0460

Non-binding request CAD model (STEP) 2.1 MB

Ultra small miniature translation stages with piezo electic inertial drive. Vacuum edition of MS15.

Specifications

Technical data
Width15 mm
Height7 mm
Depth15 mm
Travel3.5 mm
Article NumberMS.015.0460
Mass6 g
Velocity1.5 mm/s
Max. load
Momentum (Mx)4 Ncm
Momentum (My)4 Ncm
Momentum (Mz)4 Ncm
Blocking force (Fx)3 N
Bearing force (Fy, Fz)20 N
Guidance accuracy
Yaw angle20 arc sec
Pitch angle60 arc sec
Vertical deviation1 µm
Lateral deviation2 µm

Other versions