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MS15 xyz-mounted (HV edition)

MS15 xyz-mounted (HV edition)
3 DimensionalVacuum

High vacuum 3D linear

MS15 xyz-mounted (vacuum edition)

  • for high vacuum conditions up to 10⁻⁶ mbar
  • 3.5 mm travel in x, y and z direction
  • smallest product in our portfolio
Travel
3.5 mm
W × D × H
15 × 15 × 7 mm
Article no.
MS.015.0463

Non-binding request CAD model (STEP) 7.0 MB

Ultra small miniature translation stages with piezo electic inertial drive. Vacuum edition of MS15.

Specifications

Technical data
Width15 mm
Height7 mm
Depth15 mm
Travel3.5 mm
Article NumberMS.015.0463
Mass6 g
Velocity1.5 mm/s
Max. Load (3 axis)
Mx, My, Mz (momentum)4 Ncm
Blocking forces (Fx, Fy, Fz)3 N
Guidance accuracy
Yaw angle20 arc sec
Pitch angle60 arc sec
Vertical deviation1 µm
Lateral deviation2 µm

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