Ultra small miniature translation stages with piezo electic inertial drive. UHV edition of MS15.
MS15 xyz-mounted (UHV edition)
MS15 xyz-mounted (UHV edition)
- for ultra-high vacuum conditions up to 10⁻⁹ mbar
- 3.5 mm travel in x, y and z direction
- 15 x 15 mm footprint
- Travel
- 3.5 mm
- W × D × H
- 15 × 15 × 7 mm
- Article no.
- MS.015.0493
Specifications
| Width | 15 mm |
|---|---|
| Height | 7 mm |
| Depth | 15 mm |
| Travel | 3.5 mm |
| Article Number | MS.015.0493 |
| Mass | 6 g |
| Velocity | 1.5 mm/s |
| Mx, My, Mz (momentum) | 4 Ncm |
|---|---|
| Blocking forces (Fx, Fy, Fz) | 3 N |
| Yaw angle | 20 arc sec |
|---|---|
| Pitch angle | 60 arc sec |
| Vertical deviation | 1 µm |
| Lateral deviation | 2 µm |
Other versions
MS15 – 10mm (HV edition)
- Travel
- 10 mm
- W × D × H
- 22 × 15 × 7 mm
Details MS15 – 10mm (HV edition) Request MS15 – 10mm (HV edition) STEP
MS15 – 10mm (UHV edition)
- Travel
- 10 mm
- W × D × H
- 22 × 15 × 7 mm
Details MS15 – 10mm (UHV edition) Request MS15 – 10mm (UHV edition) STEP
MS15 (HV edition)
- Travel
- 3.5 mm
- W × D × H
- 15 × 15 × 7 mm
MS15 (UHV edition)
- Travel
- 3.5 mm
- W × D × H
- 15 × 15 × 7 mm
MS15 xy-mounted
- Travel
- 3.5 mm
- W × D × H
- 15 × 15 × 7 mm
MS15 xy-mounted (HV edition)
- Travel
- 3.5 mm
- W × D × H
- 15 × 15 × 7 mm
Details MS15 xy-mounted (HV edition) Request MS15 xy-mounted (HV edition) STEP
MS15 xy-mounted (UHV edition)
- Travel
- 3.5 mm
- W × D × H
- 15 × 15 × 7 mm
Details MS15 xy-mounted (UHV edition) Request MS15 xy-mounted (UHV edition) STEP
MS15 xyz-mounted
- Travel
- 3.5 mm
- W × D × H
- 15 × 15 × 7 mm
MS15 xyz-mounted (HV edition)
- Travel
- 3.5 mm
- W × D × H
- 15 × 15 × 7 mm
Details MS15 xyz-mounted (HV edition) Request MS15 xyz-mounted (HV edition) STEP