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MS15 xy-mounted (UHV edition)

MS15 xy-mounted (UHV edition)
2 DimensionalUHV

UHV 2D linear

MS15 xy-mounted (UHV edition)

  • for ultra-high vacuum conditions up to 10⁻⁹ mbar
  • 3.5 mm travel in x and y direction
  • smallest product in our portfolio
Travel
3.5 mm
W × D × H
15 × 15 × 7 mm
Article no.
MS.015.0492

Non-binding request CAD model (STEP) 4.1 MB

Ultra small miniature translation stages with piezo electic inertial drive. UHV edition of MS15.

Specifications

Technical data
Width15 mm
Height7 mm
Depth15 mm
Travel3.5 mm
Article NumberMS.015.0492
Mass6 g
Velocity1.5 mm/s
Max. Load (2 axis)
Mx, My, Mz (momentum)4 Ncm
Blocking forces (Fx, Fy)3 N
Bearing force (Fz)20 N
Guidance accuracy
Yaw angle20 arc sec
Pitch angle60 arc sec
Vertical deviation1 µm
Lateral deviation2 µm

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