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MS15 – 10mm (UHV edition)

MS15 – 10mm (UHV edition)
1 DimensionalUHV

UHV 1D linear

MS15 – 10mm travel (UHV edition)

  • 10mm travel with 22 x 15 mm footprint
  • compact design for UHV applications
  • xy combination without adapter plate
Travel
10 mm
W × D × H
22 × 15 × 7 mm
Article no.
MS.015.1090

Non-binding request CAD model (STEP) 2.2 MB

Ultra small miniature translation stages with piezo electic inertial drive for UHV applications.

Specifications

Technical data
Width22 mm
Height7 mm
Depth15 mm
Travel10 mm
Article NumberMS.015.1090
Mass20 g
Velocity1.5 mm/s
Max. load
Momentum (Mx)4.5 Ncm
Momentum (My)1.5 Ncm
Momentum (Mz)3.2 Ncm
Blocking force (Fx)3 N
Bearing force (Fy, Fz)20 N
Guidance accuracy
Yaw angle20 arc sec
Pitch angle60 arc sec
Vertical deviation1 µm
Lateral deviation2 µm

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