Miniature translation stage with piezo electric inertial drive. Vacuum edition of MS 30 – 18mm.
MS30 – 18mm (HV edition)
MS30 – 18mm travel (vacuum edition)
- for high vacuum conditions up to 10⁻⁶ mbar
- 18 mm travel at 30 x 40 mm footprint
- our all-rounder
- multi axes combinations without adapter plates
- Travel
- 18 mm
- W × D × H
- 40 × 30 × 12.5 mm
- Article no.
- MS.030.1860
Specifications
| Width | 40 mm |
|---|---|
| Height | 12.5 mm |
| Depth | 30 mm |
| Travel | 18 mm |
| Article Number | MS.030.1860 |
| Mass | 38 g |
| Velocity | 1.2 mm/s |
| Momentum (Mx) | 5 Ncm |
|---|---|
| Momentum (My) | 5 Ncm |
| Momentum (Mz) | 5 Ncm |
| Blocking force (Fx) | 4.5 N |
| Bearing force (Fy, Fz) | 30 N |
| Yaw angle | 150 arc sec |
|---|---|
| Pitch angle | 120 arc sec |
| Vertical deviation | 2 µm |
| Lateral deviation | 2 µm |
Other versions
MS30 – 18mm (UHV edition)
- Travel
- 18 mm
- W × D × H
- 40 × 30 × 12.5 mm
Details MS30 – 18mm (UHV edition) Request MS30 – 18mm (UHV edition) STEP
MS30 – 18mm with measuring
- Travel
- 18 mm
- W × D × H
- 40 × 30 × 12.5 mm
Details MS30 – 18mm with measuring Request MS30 – 18mm with measuring STEP
MS30 – 30mm (HV edition)
- Travel
- 30 mm
- W × D × H
- 52 × 30 × 12.5 mm
Details MS30 – 30mm (HV edition) Request MS30 – 30mm (HV edition)
MS30 – 30mm (UHV edition)
- Travel
- 30 mm
- W × D × H
- 52 × 30 × 12.5 mm
Details MS30 – 30mm (UHV edition) Request MS30 – 30mm (UHV edition)
MS30 – 30mm with measuring
- Travel
- 30 mm
- W × D × H
- 52 × 30 × 12.5 mm
Details MS30 – 30mm with measuring Request MS30 – 30mm with measuring
MS30 – 8mm (HV edition)
- Travel
- 8 mm
- W × D × H
- 30 × 30 × 12.5 mm
Details MS30 – 8mm (HV edition) Request MS30 – 8mm (HV edition) STEP
MS30 – 8mm (UHV edition)
- Travel
- 8 mm
- W × D × H
- 30 × 30 × 12.5 mm
Details MS30 – 8mm (UHV edition) Request MS30 – 8mm (UHV edition) STEP
MS30 – 8mm with measuring
- Travel
- 8 mm
- W × D × H
- 30 × 30 × 12.5 mm
Details MS30 – 8mm with measuring Request MS30 – 8mm with measuring STEP