MS30 – 30mm with measuring

Standard 1D servo

30 mm travel at 45 x 52 mm footprint
for closed loop operation (resolution up to 50nm)
multi axes combinations without adapter plates

Travel: 30 mm
W × D × H: 52 × 30 × 12.5 mm
Article no.: MS.030.3001

Non-binding request

Miniature translation stage with piezo electric inertial drive with measuring system.

Specifications

Technical data
Width	52 mm
Height	12.5 mm
Depth	30 mm
Travel	30 mm
Article Number	MS.030.3001
Mass	54 g
Velocity	1.2 mm/s

Max. load
Momentum (Mx)	5 Ncm
Momentum (My)	5 Ncm
Momentum (Mz)	5 Ncm
Blocking force (Fx)	4.5 N
Bearing force (Fy, Fz)	30 N

Guidance accuracy
Yaw angle	170 arc sec
Pitch angle	160 arc sec
Vertical deviation	3 µm
Lateral deviation	3 µm

Measurement Information
Reference Mark	middle
Resolution	1um to 50 nm
Supply Voltage	5 V
Power Consumption	150 mA

Other versions

MS30 – 18mm

Standard 1D linear

Travel: 18 mm
W × D × H: 40 × 30 × 12.5 mm

Details MS30 – 18mm Request MS30 – 18mm

MS30 – 18mm (HV edition)

High vacuum 1D linear

Travel: 18 mm
W × D × H: 40 × 30 × 12.5 mm

Details MS30 – 18mm (HV edition) Request MS30 – 18mm (HV edition) STEP

MS30 – 18mm (UHV edition)

UHV 1D linear

Travel: 18 mm
W × D × H: 40 × 30 × 12.5 mm

Details MS30 – 18mm (UHV edition) Request MS30 – 18mm (UHV edition) STEP

MS30 – 18mm with measuring

Standard 1D servo

Travel: 18 mm
W × D × H: 40 × 30 × 12.5 mm

Details MS30 – 18mm with measuring Request MS30 – 18mm with measuring STEP

MS30 – 30mm

Standard 1D linear

Travel: 30 mm
W × D × H: 52 × 30 × 12.5 mm

Details MS30 – 30mm Request MS30 – 30mm

MS30 – 30mm (HV edition)

High vacuum 1D linear

Travel: 30 mm
W × D × H: 52 × 30 × 12.5 mm

Details MS30 – 30mm (HV edition) Request MS30 – 30mm (HV edition)

MS30 – 30mm (UHV edition)

UHV 1D linear

Travel: 30 mm
W × D × H: 52 × 30 × 12.5 mm

Details MS30 – 30mm (UHV edition) Request MS30 – 30mm (UHV edition)

MS30 – 8mm

Standard 1D linear

Travel: 8 mm
W × D × H: 30 × 30 × 12.5 mm

Details MS30 – 8mm Request MS30 – 8mm STEP

MS30 – 8mm (HV edition)

High vacuum 1D linear

Travel: 8 mm
W × D × H: 30 × 30 × 12.5 mm

Details MS30 – 8mm (HV edition) Request MS30 – 8mm (HV edition) STEP

MS30 – 8mm (UHV edition)

UHV 1D linear

Travel: 8 mm
W × D × H: 30 × 30 × 12.5 mm

Details MS30 – 8mm (UHV edition) Request MS30 – 8mm (UHV edition) STEP

MS30 – 8mm with measuring

Standard 1D servo

Travel: 8 mm
W × D × H: 30 × 30 × 12.5 mm

Details MS30 – 8mm with measuring Request MS30 – 8mm with measuring STEP