Moore's Law keeps compressing IC line widths and feature-sizes. In order to keep up, nanopositioning mechanisms and precision motion control systems embedded in front-end production and metrology tools must provide 10 to 1000x higher precision than feature size. Conventional positioning systems do not provide the required stability and precision.




mechOnics offers a wide variety of piezo based solutions: from the very compact miniature positioner MS15 to the ultra-high-performance long-travel nanopositioning piezo stages MS30.

Other precision motion products include the piezo tilt platform MT25 for beam stabilization / correction.

Optical nanometrology sensors of the series PS30 measure the motion down to the nanometer range with very high bandwidth.