These piezo inertial drives are used in many fields of industry, in which parts have to positioned in the range of sub µm range.

For example the micro positioner MS30 is used in many industrial lasers in positioning of optics – even in the cavity of the lasers.

Integrated metrology systems feature resolution in the nanometer and sub-nanometer range for closed-loop operation with USB-controllers are used in semiconductor industry.


Furthermore the ultra-compact micro positioners MS15 are used in SEM microscopes both for the movement of the probe and the rough positioning of the probe tip.