Miniature xyz positioners with piezo electrical inertial drive. Vacuum edition of the MX 25.
MX25 (HV edition)
MX25 – 2mm travel (vacuum edition)
- for high vacuum conditions up to 10⁻⁶ mbar
- 2 mm travel in x, y and z direction
- 25 x 35 mm footprint
- Travel
- 2 mm
- W × D × H
- 35 × 25 × 18.5 mm
- Article no.
- MX.025.1060
Specifications
| Width | 35 mm |
|---|---|
| Height | 18.5 mm |
| Depth | 25 mm |
| Travel | 2 mm |
| Article Number | MX.025.1060 |
| Mass | 46 g |
| Velocity | 1.2 mm/s |
| Mx, My, Mz (momentum) | 1.5 Ncm |
|---|---|
| Blocking forces (Fx, Fy, Fz) | 2 N |
| Yaw angle | 20 arc sec |
|---|---|
| Pitch angle | 60 arc sec |
| Vertical deviation | 2 µm |
| Lateral deviation | 2 µm |
Other versions
MX25 (UHV edition)
- Travel
- 2 mm
- W × D × H
- 35 × 25 × 18.5 mm