Miniature translastion stages with free opening dia 10mm and piezo electrical inertial drive. Vaccuum edition of MS 38.
MS38 (HV edition)
MS38 – 8mm travel (vacuum edition)
- for high vacuum conditions up to 10⁻⁶ mbar
- 8 mm travel at 38 x 42 mm footprint
- free aperture of 10 mm for ray passage
- Travel
- 8 mm
- W × D × H
- 38 × 40 × 9.5 mm
- Article no.
- MS.038.0860
Specifications
| Width | 38 mm |
|---|---|
| Height | 9.5 mm |
| Depth | 40 mm |
| Travel | 8 mm |
| Article Number | MS.038.0860 |
| Mass | 32 g |
| Velocity | 1.5 mm/s |
| Momentum (Mx) | 4 Ncm |
|---|---|
| Momentum (My) | 4 Ncm |
| Momentum (Mz) | 4 Ncm |
| Blocking force (Fx) | 4.5 N |
| Bearing force (Fy, Fz) | 20 N |
| Yaw angle | 20 arc sec |
|---|---|
| Pitch angle | 60 arc sec |
| Vertical deviation | 1 µm |
| Lateral deviation | 2 µm |
Other versions
MS38 (UHV edition)
- Travel
- 8 mm
- W × D × H
- 38 × 40 × 9.5 mm