Miniature xyz positioners with piezo electrical inertial drive. UHV edition of the MX 35.
MX35 (UHV edition)
MX35 – 10mm travel (UHV edition)
- for high vacuum conditions up to 10⁻⁹ mbar
- 10 mm travel in x, y and z direction
- 35 x 45 mm footprint
- Travel
- 10 mm
- W × D × H
- 45 × 35 × 36 mm
- Article no.
- MX.035.1090
Specifications
| Width | 45 mm |
|---|---|
| Height | 36 mm |
| Depth | 35 mm |
| Travel | 10 mm |
| Article Number | MX.035.1090 |
| Mass | 76 g |
| Velocity | 1.2 mm/s |
| Mx, My, Mz (momentum) | 0.15 Ncm |
|---|---|
| Blocking forces (Fx, Fy, Fz) | 2 N |
| Yaw angle | 20 arc sec |
|---|---|
| Pitch angle | 60 arc sec |
| Vertical deviation | 2 µm |
| Lateral deviation | 2 µm |
Other versions
MX35 (HV edition)
- Travel
- 10 mm
- W × D × H
- 45 × 35 × 36 mm