MS15 - 10mm travel (UHV edition)
1 Dimensional UHV

MS15 - 10mm travel (UHV edition)

  • 10mm travel with 22 x 15 mm footprint
  • compact design for UHV applications
  • xy combination without adapter plate


Ultra small miniature translation stages with piezo electic inertial drive for UHV applications.


Technical data
Width22 mm
Height7 mm
Depth15 mm
Travel10 mm
Article NumberMS.015.1090
Mass20 g
Velocity1.5 mm/s
Max. load
Momentum (Mx)4.5 Ncm
Momentum (My)1.5 Ncm
Momentum (Mz)3.2 Ncm
Blocking force (Fx)3 N
Bearing force (Fy, Fz)20 N
Guidance accuracy
Yaw angle20 arc sec
Pitch angle60 arc sec
Vertical deviation1 um
Lateral deviation2 um
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