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MX35 - 10mm travel (UHV edition)
- for high vacuum conditions up to 10^(-9) mbar
- 10 mm travel in x, y and z direction
- 35 x 45 mm footprint
Miniature xyz positioners with piezo electrical inertial drive. UHV edition of the MX 35.
| Technical data | |
|---|---|
| Width | 45 mm |
| Height | 36 mm |
| Depth | 35 mm |
| Travel | 10 mm |
| Article Number | MX.035.1090 |
| Mass | 76 g |
| Velocity | 1.2 mm/s |
| Max. Load (3 axis) | |
|---|---|
| Mx, My, Mz (momentum) | 0.15 Ncm |
| Blocking forces (Fx, Fy, Fz) | 2 N |
| Guidance accuracy | |
|---|---|
| Yaw angle | 20 arc sec |
| Pitch angle | 60 arc sec |
| Vertical deviation | 2 um |
| Lateral deviation | 2 um |
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