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MX35 - 10mm travel (vacuum edition)
- for high vacuum conditions up to 10^(-6) mbar
- 10 mm travel in x, y and z direction
- 35 x 45 mm footprint
Miniature xyz positioners with piezo electrical inertial drive. Vacuum edition of the MX 35.
Technical data | |
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Width | 45 mm |
Height | 36 mm |
Depth | 35 mm |
Travel | 10 mm |
Article Number | MX.035.1060 |
Mass | 76 g |
Velocity | 1 mm/s |
Max. Load (3 axis) | |
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Mx, My, Mz (momentum) | 1.5 Ncm |
Blocking forces (Fx, Fy, Fz) | 2 N |
Guidance accuracy | |
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Yaw angle | 20 arc sec |
Pitch angle | 60 arc sec |
Vertical deviation | 2 um |
Lateral deviation | 2 um |
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