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MX25 - 2mm travel (UHV edition)
3 Dimensional UHV

MX25 - 2mm travel (UHV edition)

  • for high vacuum conditions up to 10^(-9) mbar
  • 2 mm travel in x, y and z direction
  • 25 x 35 mm footprint

 

Miniature xyz positioners with piezo electrical inertial drive. UHV edition of the MX 25.

 

Technical data
Width35 mm
Height18.5 mm
Depth25 mm
Travel2 mm
Article NumberMX.025.1090
Mass46 g
Velocity1.2 mm/s
Max. Load (3 axis)
Mx, My, Mz (momentum)1.5 Ncm
Blocking forces (Fx, Fy, Fz)2 N
Guidance accuracy
Yaw angle20 arc sec
Pitch angle60 arc sec
Vertical deviation2 um
Lateral deviation2 um
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