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ML17 - 5mm travel (UHV edition)
1 Dimensional UHV

ML17 - 5mm travel (UHV edition)

  • 5 mm travel at 17 x 32 mm footprint
  • for ultra-low temperatures up to 4K
  • for high vacuum conditions up to 10^(-9) mbar

 

Miniature translation stages for ultra low temperatures with piezo electric inertial drive. UHV edition of the ML 17.

 

Technical data
Width17 mm
Height8 mm
Depth32 mm
Travel5 mm
Article NumberML.017.0590
Mass25 g
Velocity1 mm/s
Max. load
Momentum (Mx)3 Ncm
Momentum (My)3 Ncm
Momentum (Mz)3 Ncm
Blocking force (Fx)1 N
Bearing force (Fy, Fz)1 N
Guidance accuracy
Yaw angle20 arc sec
Pitch angle60 arc sec
Vertical deviation2 um
Lateral deviation1 um
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