ML17 - 5mm travel
1 Dimensional Vacuum

ML17 - 5mm travel

  • 5 mm travel at 17 x 32 mm footprint
  • for ultra-low temperatures up to 4K
  • very compact design
  • for high vacuum conditions up to 10^(-6) mbar


Miniature translation stages for ultra low temperatures with piezo electric inertial drive.


Technical data
Width17 mm
Height8 mm
Depth32 mm
Travel5 mm
Article NumberML.017.0560
Mass25 g
Velocity1 mm/s
Max. load
Momentum (Mx)3 Ncm
Momentum (My)3 Ncm
Momentum (Mz)3 Ncm
Blocking force (Fx)1 N
Bearing force (Fy, Fz)1 N
Guidance accuracy
Yaw angle20 arc sec
Pitch angle60 arc sec
Vertical deviation2 um
Lateral deviation1 um
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