DS40 - 11mm travel (UHV edition)
1 Dimensional UHV

DS40 - 11mm travel (UHV edition)

  • for high vacuum conditions up to 10^(-9) mbar
  • 11 mm travel at 40 x 40 mm footprint
  • especially flat housing (11mm height)


Miniature translation stages with piezo electric inertial drive. UHV edition of the DS 40.


Technical data
Width40 mm
Height11 mm
Depth40 mm
Travel22 mm
Article NumberDS.040.1190
Mass50 g
Velocity1.2 mm/s
Max. load
Momentum (Mx)5 Ncm
Momentum (My)5 Ncm
Momentum (Mz)5 Ncm
Blocking force (Fx)4.5 N
Bearing force (Fy, Fz)30 N
Guidance accuracy
Yaw angle20 arc sec
Pitch angle60 arc sec
Vertical deviation1 um
Lateral deviation2 um
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