DS30 - 8mm travel (UHV edition)
1 Dimensional UHV

DS30 - 8mm travel (UHV edition)

  • for high vacuum conditions up to 10^(-9) mbar
  • 8 mm travel at 30 x 30 mm footprint
  • especially flat housing (10mm height)


Miniature translation stages with piezo electrical inertial drive. UHV edition of the DS 30.


Technical data
Width30 mm
Height10 mm
Depth30 mm
Travel8 mm
Article NumberDS.030.0890
Mass32 g
Velocity1.2 mm/s
Max. load
Momentum (Mx)5 Ncm
Momentum (My)5 Ncm
Momentum (Mz)5 Ncm
Blocking force (Fx)4.5 N
Bearing force (Fy, Fz)30 N
Guidance accuracy
Yaw angle20 arc sec
Pitch angle60 arc sec
Vertical deviation1 um
Lateral deviation2 um
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