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MS38 - 8mm travel (UHV edition)
1 Dimensional Vacuum

MS38 - 8mm travel (UHV edition)

  • for high vacuum conditions up to 10^(-9) mbar
  • 8 mm travel at 38 x 42 mm footprint
  • free aperture of 10 mm for ray passage

 

Miniature translastion stages with free opening dia 10mm and piezo electrical inertial drive. UHV edition of MS 38.

 

Technical data
Width38 mm
Height9.5 mm
Depth40 mm
Travel8 mm
Article NumberMS.038.0890
Mass32 g
Velocity1.5 mm/s
Max. load
Momentum (Mx)4 Ncm
Momentum (My)4 Ncm
Momentum (Mz)4 Ncm
Blocking force (Fx)4.5 N
Bearing force (Fy, Fz)20 N
Guidance accuracy
Yaw angle20 arc sec
Pitch angle60 arc sec
Vertical deviation1 um
Lateral deviation2 um
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