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MS30 - 30mm with measuring
- 30 mm travel at 45 x 52 mm footprint
- for closed loop operation (resolution up to 50nm)
- multi axes combinations without adapter plates
Miniature translation stage with piezo electric inertial drive with measuring system.
| Technical data | |
|---|---|
| Width | 52 mm |
| Height | 12.5 mm |
| Depth | 30 mm |
| Travel | 30 mm |
| Article Number | MS.030.3001 |
| Mass | 54 g |
| Velocity | 1.2 mm/s |
| Max. load | |
|---|---|
| Momentum (Mx) | 5 Ncm |
| Momentum (My) | 5 Ncm |
| Momentum (Mz) | 5 Ncm |
| Blocking force (Fx) | 4.5 N |
| Bearing force (Fy, Fz) | 30 N |
| Guidance accuracy | |
|---|---|
| Yaw angle | 170 arc sec |
| Pitch angle | 160 arc sec |
| Vertical deviation | 3 um |
| Lateral deviation | 3 um |
| Measurement Information | |
|---|---|
| Reference Mark | middle |
| Resolution | 1um to 50 nm |
| Supply Voltage | 5 V |
| Power Consumption | 150 mA |
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