MS30 - 30mm with measuring
1 Dimensional

MS30 - 30mm with measuring

  • 30 mm travel at 45 x 52 mm footprint
  • for closed loop operation (resolution up to 50nm)
  • multi axes combinations without adapter plates


Miniature translation stage with piezo electric inertial drive with measuring system.


Technical data
Width52 mm
Height12.5 mm
Depth30 mm
Travel30 mm
Article NumberMS.030.3001
Mass54 g
Velocity1.2 mm/s
Max. load
Momentum (Mx)5 Ncm
Momentum (My)5 Ncm
Momentum (Mz)5 Ncm
Blocking force (Fx)4.5 N
Bearing force (Fy, Fz)30 N
Guidance accuracy
Yaw angle170 arc sec
Pitch angle160 arc sec
Vertical deviation3 um
Lateral deviation3 um
Measurement Information
Reference Markmiddle
Resolution1um to 50 nm
Supply Voltage5 V
Power Consumption150 mA
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