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MS30 - 8mm with measuring
- 8 mm travel at 45 x 34 mm footprint
- various mounting possibilities
- for closed loop operation (resolution up to 50nm)
- multi axes combinations without adapter plates
Miniature translation stage with piezo electric inertial drive with measuring system.
STP File *
Technical data | |
---|---|
Width | 30 mm |
Height | 12.5 mm |
Depth | 30 mm |
Travel | 8 mm |
Article Number | MS.030.0801 |
Mass | 32 g |
Velocity | 1.2 mm/s |
Max. load | |
---|---|
Momentum (Mx) | 5 Ncm |
Momentum (My) | 5 Ncm |
Momentum (Mz) | 5 Ncm |
Blocking force (Fx) | 4.5 N |
Bearing force (Fy, Fz) | 30 N |
Guidance accuracy | |
---|---|
Yaw angle | 120 arc sec |
Pitch angle | 60 arc sec |
Vertical deviation | 1 um |
Lateral deviation | 2 um |
Measurement Information | |
---|---|
Reference Mark | middle |
Resolution | 1um to 50 nm |
Supply Voltage | 5 V |
Power Consumption | 150 mA |
* you need to install the STP Viewer to view these files