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MS30 - 30mm (UHV edition)
1 Dimensional UHV

MS30 - 30mm (UHV edition)

  • for ultra-high vacuum conditions up to 10^(-9) mbar
  • 30 mm travel at 30 x 52 mm footprint
  • our all-rounder
  • multi axes combinations without adapter plates
Technical data
Width52 mm
Height12.5 mm
Depth30 mm
Travel30 mm
Article NumberMS.030.3090
Mass32 g
Velocity1.2 mm/s
Max. load
Momentum (Mx)5 Ncm
Momentum (My)5 Ncm
Momentum (Mz)5 Ncm
Blocking force (Fx)4.5 N
Bearing force (Fy, Fz)30 N
Guidance accuracy
Yaw angle20 arc sec
Pitch angle60 arc sec
Vertical deviation1 um
Lateral deviation2 um
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