MS30 - 30mm travel (vacuum edition)

MS30 - 30mm travel (vacuum edition)

  • for high vacuum conditions up to 10^(-6) mbar
  • many mounting possibilities
  • our all-rounder
  • multi axes combinations without adapter plates


Miniature translation stage with piezo electric inertial drive. Vacuum edition of MS 30 - 30mm.


Technical data
Width52 mm
Height12.5 mm
Depth30 mm
Travel30 mm
Article NumberMS.030.3060
Mass32 g
Velocity1.2 mm/s
Max. load
Momentum (Mx)5 Ncm
Momentum (My)5 Ncm
Momentum (Mz)5 Ncm
Blocking force (Fx)4.5 N
Bearing force (Fy, Fz)30 N
Guidance accuracy
Yaw angle170 arc sec
Pitch angle170 arc sec
Vertical deviation3 um
Lateral deviation3 um
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