MS15 xyz-mounted (vacuum edition)
3 Dimensional Vacuum

MS15 xyz-mounted (vacuum edition)

  • for high vacuum conditions up to 10^(-6) mbar
  • 3.5 mm travel in x, y and z direction
  • smallest product in our portfolio


Ultra small miniature translation stages with piezo electic inertial drive. Vacuum edition of MS15.


Technical data
Width15 mm
Height7 mm
Depth15 mm
Travel3 mm
Article NumberMS.015.0463
Mass6 g
Velocity1.5 mm/s
Max. Load (3 axis)
Mx, My, Mz (momentum)4 Ncm
Blocking forces (Fx, Fy, Fz)3 N
Guidance accuracy
Yaw angle20 arc sec
Pitch angle60 arc sec
Vertical deviation1 um
Lateral deviation2 um
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