MS15 xy-mounted (UHV edition)
2 Dimensional UHV

MS15 xy-mounted (UHV edition)

  • for ultra-high vacuum conditions up to 10^(-9) mbar
  • 3.5 mm travel in x and y direction
  • smallest product in our portfolio


Ultra small miniature translation stages with piezo electic inertial drive. UHV edition of MS15.


Technical data
Width15 mm
Height7 mm
Depth15 mm
Travel3 mm
Article NumberMS.015.0492
Mass6 g
Velocity1.5 mm/s
Max. Load (2 axis)
Mx, My, Mz (momentum)4 Ncm
Blocking forces (Fx, Fy)3 N
Bearing force (Fz)20 N
Guidance accuracy
Yaw angle20 arc sec
Pitch angle60 arc sec
Vertical deviation1 um
Lateral deviation2 um
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