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MS15 xy-mounted (vacuum edition)
- for high vacuum conditions up to 10^(-6) mbar
- 3.5 mm travel in x and y direction
- 15 x 15 mm footprint
Ultra small miniature translation stages with piezo electic inertial drive. Vacuum edition of MS15.
STP File *
| Technical data | |
|---|---|
| Width | 15 mm |
| Height | 7 mm |
| Depth | 15 mm |
| Travel | 3 mm |
| Article Number | MS.015.0462 |
| Mass | 6 g |
| Velocity | 1.5 mm/s |
| Max. Load (2 axis) | |
|---|---|
| Mx, My, Mz (momentum) | 4 Ncm |
| Blocking forces (Fx, Fy) | 3 N |
| Bearing force (Fz) | 20 N |
| Guidance accuracy | |
|---|---|
| Yaw angle | 20 arc sec |
| Pitch angle | 60 arc sec |
| Vertical deviation | 1 um |
| Lateral deviation | 2 um |
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