MS15 (3.5mm travel)
1 Dimensional

MS15 (3.5mm travel)

  • 3.5mm travel with 15 x 15 mm footprint
  • compact design
  • smallest product in our portfolio
  • step width about 10 nm with CF30 controller


Ultra small miniature translation stages with piezo electic inertial drive.


Technical data
Width15 mm
Height7 mm
Depth15 mm
Travel3 mm
Article NumberMS.015.0400
Mass6 g
Velocity1.5 mm/s
Max. load
Momentum (Mx)4 Ncm
Momentum (My)4 Ncm
Momentum (Mz)4 Ncm
Blocking force (Fx)3 N
Bearing force (Fy, Fz)20 N
Guidance accuracy
Yaw angle20 arc sec
Pitch angle60 arc sec
Vertical deviation1 um
Lateral deviation2 um
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