MS15 (3.5mm travel)
1 Dimensional

MS15 (3.5mm travel)

  • 3.5mm travel with 15 x 15 mm footprint
  • compact design
  • smallest product in our portfolio


Ultra small miniature translation stages with piezo electic inertial drive.


Technical data
Width15 mm
Height7 mm
Depth15 mm
Travel3 mm
Article NumberMS.015.0400
Mass6 g
Velocity1.5 mm/s
Max. load
Momentum (Mx)4 Ncm
Momentum (My)4 Ncm
Momentum (Mz)4 Ncm
Blocking force (Fx)3 N
Bearing force (Fy, Fz)20 N
Guidance accuracy
Yaw angle20 arc sec
Pitch angle60 arc sec
Vertical deviation1 um
Lateral deviation2 um
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