Piezo actuators of mechOnics provide very long travel ranges and require little to no power in quasistatic applications. This performs these actuators for the work in a vacuum – conditions which can be found in space applications or at many new experiments for physics.

 

 

 

 

 

 

All our stages are available for vacuum from 10-6 mbar to 10-9 mbar. In collaboration with our customers also positioners were designed to work up to 10-11 mbar.