Categories

Componentfilter

DSP50 multi-phase linear stage
1 Dimensional NOVA

DSP50 multi-phase linear stage

  • driving force up to 15 N
  • repeatabilities up to 1 nm
  • 10 mm travel at 50 x 50 mm footprint
  • ultra compact multiphase stage
  • for NOVA controller system

 

Our new DSP50 linear stage, for the new generation of NOVA-controller

devices, can handle up to 16N blocking force over a travel range of

10mm. With its specialist multi-phase controller it has a speed of up to

1mm/s and an extremely uniform movement due to the use of multiple

piezo inertia drives.

The optical sensor allows movement detection with a precision of 1nm and high repeatability.

The linear stage is available as uniaxial, biaxial or triaxial positioning system for standard and vacuum conditions.

The very compact design, reproducibility and outstanding precision

give you advantages for many fields of use (e.g. optical measurement and

adjustment).

 

Technical data
Width50 mm
Height16 mm
Depth50 mm
Travel10 mm
Article NumberDSP.050.1006
Mass115 g
Velocity1 mm/s
Max. load
Momentum (Mx)6.5 Ncm
Momentum (My)6.5 Ncm
Momentum (Mz)6.5 Ncm
Blocking force (Fx)16 N
Bearing force (Fy, Fz)0 N
Guidance accuracy
Yaw angle20 arc sec
Pitch angle60 arc sec
Vertical deviation1 um
Lateral deviation2 um
Measurement Information
Reference Markmiddle
Resolution1um to 1 nm
Supply Voltage5 V
Power Consumption200 mA
* you need to install the STP Viewer to view these files