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NDS70 - NOVA Stage with 15mm travel
- 15 mm travel at 70 x 70 mm footprint
- for closed-loop (up to 50 nm resolution)
- for NOVA system
Miniature translation stages with piezo electric inertial drive for NOVA system. Standard edition
| Technical data | |
|---|---|
| Width | 70 mm |
| Height | 20 mm |
| Depth | 70 mm |
| Travel | 15 mm |
| Article Number | NDS.070.1502 |
| Mass | 120 g |
| Velocity | 1 mm/s |
| Max. load | |
|---|---|
| Momentum (Mx) | 5 Ncm |
| Momentum (My) | 5 Ncm |
| Momentum (Mz) | 5 Ncm |
| Blocking force (Fx) | 9 N |
| Bearing force (Fy, Fz) | 30 N |
| Guidance accuracy | |
|---|---|
| Yaw angle | 20 arc sec |
| Pitch angle | 60 arc sec |
| Vertical deviation | 1 um |
| Lateral deviation | 2 um |
| Measurement Information | |
|---|---|
| Reference Mark | center |
| Resolution | 1um to 50 nm |
| Supply Voltage | 5 V |
| Power Consumption | 150 mA |
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