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MS15 xyz-mounted
3 Dimensional

MS15 xyz-mounted

  • 3.5 mm travel in x, y and z direction
  • Compact design
  • smallest product in our portfolio

 

Ultra small miniature translation stages with piezo electic inertial drive.

 

Technical data
Width15 mm
Height7 mm
Depth15 mm
Travel3 mm
Article NumberMS.015.0403
Mass6 g
Velocity1.5 mm/s
Max. Load (3 axis)
Mx, My, Mz (momentum)4 Ncm
Blocking forces (Fx, Fy, Fz)3 N
Guidance accuracy
Yaw angle20 arc sec
Pitch angle60 arc sec
Vertical deviation1 um
Lateral deviation2 um
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